UHP EP Coaxial Seamless Tube for
Semiconductors and Microelectronics
CREST UHP Coaxial Tube Product
-
- innovative technology of pre-materials suitable for nano-applications
- sub-10nm geometries and 3D Nand and Atomic Layer Deposition (ALD)
- stainless steel seamless tubing specifications of ASTM A213/A269
- stainless steel seamless tubing specifications of JIS G3459
- double-containment tube protection
- servicing semiconductors and microelectronics
- servicing ultra high purity gas delivery system
- the corrosion-resistant solution to special gases used within wafer fab equipment gas systems
| Dimension | |
|---|---|
| OD [inch/mm] | WT [inch/mm] |
| 1/8″(3.18) | 0.0157″(0.56) |
| 1/4″(6.35) | 0.022″(0.89) |
| 3/8″(9.53) | 0.035″(0.89) |
| 1/2″(12.7) | 0.049″(1.24) |
| 3/4″(19.05) | 0.065″(1.65) |
| 1″(25.4) | 0.065″(1.65) |
| 1.5″(38.1) | 0.065″(1.65) |
| 2″(50.8) | 0.065″(1.65) |
| 2.5″(63.5) | 0.065″(1.65) |
| 3.0″(76.2) | 0.065″(1.65) |
| 4.0″(101.6) | 0.083″(2.11) |
| Finish Code Product Code |
Specifications ASTM/JIS |
Choice of Pre-Materials |
Surface Roughness (Max) |
||
|---|---|---|---|---|---|
| EP (Inner Tube) UHP-928 |
A213/A269 JIS G3459 |
SUS316L Double-Melt | ID | < 5 RA | < 0.127 μm |
| OD | < 32 RA | < 0.8 μm | |||
| BA (Outer Tube) UHP-912 |
A213/A269 JIS G3459 |
316L SUS316L |
ID | < 15 RA | < 0.38 μm |
| OD | < 32 RA | < 0.8 μm | |||
| AP (Outer Tube) UHP-910 |
A213/A269 JIS G3459 |
316L SUS316L |
ID | < Cold Drawn | < Bright Annealed |
| OD | < 32 RA | < 0.8 μm | |||