
High Purity CFOS Tubing for Vacuum Process
High-Purity CFOS Tubing for
Semiconductor Vacuum Process
CREST HVT is precision-engineered and manufactured seamless according to ASTM A213 or welded-as-seam-less (WSL) according to A269/A270 or JIS G3459 with the specific purpose of servicing high-vacuum process for semiconductor and related industries such as LCD, LED, OLED, poly-silicon and solar cells.
Dimension | |
---|---|
OD [inch/mm] | WT [inch/mm] |
1/2″(12.7) | 0.049″(1.24) |
1/2″(12.7) | 0.065″(1.65) |
3/4″(19.05) | 0.049″(1.24) |
1″(25.4) | 0.049″(1.24) |
1″(25.4) | 0.065″(1.65) |
1.5″(38.1) | 0.065″(1.65) |
2″(50.8) | 0.065″(1.65) |
2.5″(63.5) | 0.065″(1.65) |
3″(76.2) | 0.065″(1.65) |
4″(101.6) | 0.065″(1.65) |
4″(101.6) | 0.083″(2.11) |
6″(152.4) | 0.083″(2.11) |
6″(152.4) | 0.109″(2.77) |
up 32″(812.8) | 0.688″(17.50) |
Code | Specifications | Pre-Materials | Surface Finish (max) | ||
---|---|---|---|---|---|
BA | A269/A270 | 304L 316L |
ID | Bright Annealed | Unpolished |
OD | Bright Annealed | Unpolished | |||
BAP | A269/A270 | 304L 316L |
ID | Bright Annealed | Unpolished |
OD | < 32 RA | < 0.8 μm | |||
MP | A269/A270 | 304L 316L |
ID | < 15 RA | < 0.4 μm |
OD | < 32 RA | < 0.8 μm | |||
EP | A269/A270 | 304L 316L |
ID | < 10 RA | < 0.25 μm |
OD | < 32 RA | < 0.8 μm |