High Purity CFOS Tubing for Vacuum Process
High-Purity CFOS Tubing for
Semiconductor Vacuum Process
CREST HVT is precision-engineered and manufactured seamless according to ASTM A213 or welded-as-seam-less (WSL) according to A269/A270 or JIS G3459 with the specific purpose of servicing high-vacuum process for semiconductor and related industries such as LCD, LED, OLED, poly-silicon and solar cells.
| Dimension | |
|---|---|
| OD [inch/mm] | WT [inch/mm] |
| 1/2″(12.7) | 0.049″(1.24) |
| 1/2″(12.7) | 0.065″(1.65) |
| 3/4″(19.05) | 0.049″(1.24) |
| 1″(25.4) | 0.049″(1.24) |
| 1″(25.4) | 0.065″(1.65) |
| 1.5″(38.1) | 0.065″(1.65) |
| 2″(50.8) | 0.065″(1.65) |
| 2.5″(63.5) | 0.065″(1.65) |
| 3″(76.2) | 0.065″(1.65) |
| 4″(101.6) | 0.065″(1.65) |
| 4″(101.6) | 0.083″(2.11) |
| 6″(152.4) | 0.083″(2.11) |
| 6″(152.4) | 0.109″(2.77) |
| up 32″(812.8) | 0.688″(17.50) |
| Code | Specifications | Pre-Materials | Surface Finish (max) | ||
|---|---|---|---|---|---|
| BA | A269/A270 | 304L 316L |
ID | Bright Annealed | Unpolished |
| OD | Bright Annealed | Unpolished | |||
| BAP | A269/A270 | 304L 316L |
ID | Bright Annealed | Unpolished |
| OD | < 32 RA | < 0.8 μm | |||
| MP | A269/A270 | 304L 316L |
ID | < 15 RA | < 0.4 μm |
| OD | < 32 RA | < 0.8 μm | |||
| EP | A269/A270 | 304L 316L |
ID | < 10 RA | < 0.25 μm |
| OD | < 32 RA | < 0.8 μm | |||