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UHP Vacuum Tubing | EP MP BAP BA

High Purity CFOS Tubing for Vacuum Process

High-Purity CFOS Tubing for

Semiconductor Vacuum Process

CREST HVT is precision-engineered and manufactured seamless according to ASTM A213 or welded-as-seam-less (WSL) according to A269/A270 or JIS G3459 with the specific purpose of servicing high-vacuum process for semiconductor and related industries such as LCD, LED, OLED, poly-silicon and solar cells.

Dimension
OD [inch/mm] WT [inch/mm]
1/2″(12.7) 0.049″(1.24)
1/2″(12.7) 0.065″(1.65)
3/4″(19.05) 0.049″(1.24)
1″(25.4) 0.049″(1.24)
1″(25.4) 0.065″(1.65)
1.5″(38.1) 0.065″(1.65)
2″(50.8) 0.065″(1.65)
2.5″(63.5) 0.065″(1.65)
3″(76.2) 0.065″(1.65)
4″(101.6) 0.065″(1.65)
4″(101.6) 0.083″(2.11)
6″(152.4) 0.083″(2.11)
6″(152.4) 0.109″(2.77)
up 32″(812.8) 0.688″(17.50)
Code Specifications Pre-Materials Surface Finish (max)
BA A269/A270 304L
316L
ID Bright Annealed Unpolished
OD Bright Annealed Unpolished
BAP A269/A270 304L
316L
ID Bright Annealed Unpolished
OD < 32 RA < 0.8 μm
MP A269/A270 304L
316L
ID < 15 RA < 0.4 μm
OD < 32 RA < 0.8 μm
EP A269/A270 304L
316L
ID < 10 RA < 0.25 μm
OD < 32 RA < 0.8 μm

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